| 发明名称 |
METHOD FOR THE PRODUCTION OF STRUCTURED LAYERS ON SUBSTRATES |
| 摘要 |
The invention relates to a method for the structured coating of a substrate (1) with at least one surface (2) for coating, which is suitable for the rapid and economical production of precise structuring. The method thus comprises the following steps: production of at least one negative structured first coating (3, 31, 32) on the at least one surface (2), deposition of at least one second layer (7, 71, 72, 73), which comprises a material with a glassy structure, on the surface (2) provided with the first coating (3, 31, 32) and at least partial removal of the first coating (3, 31, 32). |
| 申请公布号 |
WO03088340(A3) |
申请公布日期 |
2004.05.27 |
| 申请号 |
WO2003EP03884 |
申请日期 |
2003.04.15 |
| 申请人 |
SCHOTT GLAS;CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS;CARL-ZEISS-STIFTUNG;LEIB, JUERGEN;BIECK, FLORIAN;MUND, DIETRICH |
发明人 |
LEIB, JUERGEN;BIECK, FLORIAN;MUND, DIETRICH |
| 分类号 |
G02B3/00;B81C1/00;B81C3/00;C03B19/00;C03C4/12;C03C14/00;C03C15/00;C03C17/02;C03C17/34;C03C27/02;C23C14/10;H01L21/027;H01L21/306;H01L21/3065;H01L21/312;H01L21/316;H01L21/50;H01L21/56;H01L21/768;H01L23/00;H01L23/02;H01L23/10;H01L23/29;H01L23/31;H01L23/48;H01L23/498;H01L51/50;H01L51/52;H05B33/04;H05B33/10;H05B33/24;H05B33/26;H05B33/28;H05K3/28 |
主分类号 |
G02B3/00 |
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