| 发明名称 |
NON-ORIENTED OPTICAL CHARACTER RECOGNITION OF A WAFER MARK |
| 摘要 |
A non-oriented optical character recognition device and method for locating and reading identification markings on silicon wafers positioned in any orientation without having to physically manipulate the silicon wafer. |
| 申请公布号 |
WO2004008496(A3) |
申请公布日期 |
2004.05.27 |
| 申请号 |
WO2003US21932 |
申请日期 |
2003.07.15 |
| 申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
EVANS, FRANK;LI, FULTON |
| 分类号 |
G06K9/00;G06K9/18;G06K9/20;G06K9/32;H01L21/00 |
主分类号 |
G06K9/00 |
| 代理机构 |
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