| 摘要 |
PROBLEM TO BE SOLVED: To provide an isolation valve system capable of reducing piping cost, and improving space efficiency. SOLUTION: This isolation valve unit 10 is integrally provided with a flow gauge 11, a solenoid valve 12, first and second check valves, and an isolation valve 15. An introducing tube 25 to introduce primary side pressure to a pressure detection chamber 36 in the isolation valve 15 is integrally extended from a cylindrical tube 21 to be integrally formed with the isolation valve unit 10. The introducing tube 25 need not be separately provided. Piping cost is reduced, and space efficiency can be improved. COPYRIGHT: (C)2004,JPO
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