| 摘要 |
Disclosed is an apparatus for modifying a surface of a material enabling to improve an ion beam treated effect and efficiency of a surface modified material by installing a gas distributor distributing a reactive gas uniformly, an exhaust valve controlling an exhaust speed of the reactive gas, or a plurality of ion beam treatment areas providing various surface modification effects. The present invention includes a vacuum chamber, an ion gun generating an ion beam in the vacuum chamber, a surface-modification substrate material to which the ion beam is applied from the ion gun in the vacuum chamber, a reactive gas inlet leaving a predetermined interval from the surface-modification substrate material to supply a reactive gas, a gas distributor connected to the reactive gas inlet to maintain a partial pressure of the reactive gas uniformly on an entire surface of the surface-modification substrate material, a vacuum means for generating a vacuum of the vacuum chamber, and an exhaust valve installed at a front end of the vacuum means to control an exhaust speed of the reactive gas.
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