发明名称 |
Piezoelectric element, piezoelectric acuator and liquid jetting head incorporating the same |
摘要 |
A first piezoelectric layer is laminated on a first common electrode and comprised of a first piezoelectric material having a first residual stress. A drive electrode is laminated on the first piezoelectric layer, to which a drive signal is supplied externally. A second piezoelectric layer is laminated on the drive electrode and comprised of a second piezoelectric material having a second residual stress lower than the first residual stress. A second common electrode is laminated on the second piezoelectric layer. |
申请公布号 |
US2004100536(A1) |
申请公布日期 |
2004.05.27 |
申请号 |
US20030390155 |
申请日期 |
2003.03.18 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
JUNHUA CHANG |
分类号 |
B41J2/045;B41J2/055;B41J2/14;F04B43/04;H01L41/083;H01L41/09;H01L41/187;(IPC1-7):B41J2/045 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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