TRAJECTORY PLANNING AND EXECUTION METHOD FOR A MOVABLE COMPONENT OF A LITHOGRAPHY SYSTEM, A SYSTEM AND A COMPUTER PROGRAM THEREOF

摘要

PURPOSE: A trajectory planning and execution method for a movable component of a lithography system, a system and a computer program thereof are provided to plan and execute optimal projection for photolithography components during constant velocity scanning. CONSTITUTION: Initial control data(120) related to an start point, end point, distance and velocity of required scanning is received. An infinite jerk multi-axes trajectory(130) for the components is planned based on the initial control data(120). A profile execution operation is performed in real-time based on the planned infinite jerk multi-axes trajectory(130). Execution data including a position of the components as well as an acceleration is output to a control system. The component is a wafer stage or a reticle stage.