| 摘要 |
PROBLEM TO BE SOLVED: To provide an integrated substrate inspection apparatus which is automated and carries out all of EBR/EEW inspection, pattern defect inspection, and reticle error inspection on a substrate. SOLUTION: A first image acquiring section 110 acquires a first image of the edge of a substrate, while a second image acquiring section 120 acquires a second image on the patterns of the substrate. The first image is acquired from the substrate held on a first stage 160, while the second image is acquired from the substrate held on a second stage 170. A transfer robot 180 transfers the substrate from the first stage 160 to the second stage 170. An image processing section 140 carries out the EBR/EEW inspection on the substrate based on the first image, and carries out the pattern defect inspection and the reticle error inspection based on the second image. Since various inspection steps of the substrate are carried out with the integrated substrate inspection apparatus 100, the efficiency of the substrate inspection steps is enhanced, and reliability of the various substrate inspection steps is enhanced. COPYRIGHT: (C)2004,JPO |
