| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply device that can continue temporary gas supply even when a sequencer stops abnormally. SOLUTION: An auxiliary circuit 10 self-holds an output signal from the sequencer 2 for controlling gas supply, and controls a solenoid valve LV or a solenoid valve RV as a device in dependence on an output signal of the sequencer 2 in a normal state of the sequencer 2, and controls the solenoid valve LV or the solenoid valve RV in dependence on the self-held output signal in an abnormal state of the sequencer 2. COPYRIGHT: (C)2004,JPO
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