VAPOR DEPOSITION APPARATUS, AND APPARATUS FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To improve the utilization ratio of an apparatus by juggling the maintenance of a vaporizing source and a vapor deposition treatment. SOLUTION: The vapor deposition apparatus comprises a main vacuum chamber 3 for accommodating a substrate (a glass substrate 1) of an object to be film-formed; several auxiliary vacuum chambers 3a and 3b arranged next to the main vacuum chamber 3 through gate valves 5a and 5b for opening and closing; and source migration mechanisms 6a and 6b for advancing or retreating a vaporizing source for film formation (a line type vaporizing source 2a and a line type vaporizing source 2b) between the auxiliary vacuum chambers 3a and 3b and the main vacuum chamber 3 when the gate valves 5a and 5b are opened, which are installed in each of the several auxiliary vacuum chambers 3a and 3b. COPYRIGHT: (C)2004,JPO