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发明名称
VORRICHTUNG ZUR BREITBANDIGEN DIFFRAKTIVEN STREUUNG UND ASSOZIIERTE VERFAHREN
摘要
申请公布号
DE69916598(D1)
申请公布日期
2004.05.27
申请号
DE1999616598
申请日期
1999.05.04
申请人
DIGITAL OPTICS CORP., CHARLOTTE
发明人
KATHMAN, D.;FEDOR, ADAM S.;JOHNSON, ERIC G.;MORRIS, E.
分类号
B23K26/06;G02B5/02;G02B5/18;G02B5/32;G02B27/09;G02F1/01;G03F7/20;G03H1/04;G03H1/08;H01L21/027;(IPC1-7):G02B5/18;G03H1/00
主分类号
B23K26/06
代理机构
代理人
主权项
地址
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