| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element with high electric power resistance and its manufacturing method. SOLUTION: Comb-teeth parts 13a, 14a of a comb-tooth electrode part of the surface acoustic wave element are made into laminated structure of second ground layers 20, 24 consisting of Ti, first ground layers 21, 25 consisting of Ta and CuM alloy layers 22, 26 (where element M is any one or two kinds of Ag, Sn and C). Thus, the CuM alloy layers 22, 26 have crystallinity oriented to orientation (111) and stress migration resistance of the surface acoustic wave element is enhanced. COPYRIGHT: (C)2004,JPO |
