| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch device for accurately controlling a mirror. SOLUTION: The optical switch device is composed of a mirror substrate 130 which is supported on a specified plane on a semiconductor substrate 101 by a support 120 having conductivity and which has an aperture region, the mirror 131 which is turnably provided to the aperture region of the mirror substrate 130, a control electrode part 140 and a control circuit 150 for making the mirror 131 perform a rotational operation, a sensor electrode part 151 for detecting the rotational angle of the mirror 131, and a sensor circuit 152 for detecting the rotational angle of the mirror 131 on the basis of a signal from the sensor electrode part 151. The sensor electrode part 151 is disposed so as to be closer to the center of the mirror 131 than the control electrode part 140. COPYRIGHT: (C)2004,JPO
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