CHECKING METHOD OF DISPLAY SUBSTRATE AND DEVICE, PARTICULARLY CONCERNED WITH DETECTING A DEFECT OF DISPLAY SUBSTRATE WITHOUT USING A POLARIZED FILTER OR A DRIVING APPARATUS

摘要

PURPOSE: A checking method of a display substrate and a device thereof are provided to obtain defect information without being affected by a defect of an optical detection element of an optical detector and foreign substance existing inside a display substrate, while being applied to a checking technology using a reflected light by disposing a reflector at the back of the display substrate. CONSTITUTION: A checking device(10) comprises as follows. A chuck top(14) adopts a display substrate(12) to be checked. A checking stage(16) displaces the chuck top(14), while a probe unit(18) is connected to the display substrate(12). An optical detector(20) detects a light passing through the display substrate(12) with an electric signal. A polarized filter(22) is disposed to enter an optical path between the display substrate(12) and the optical detector(20). A driving apparatus(24) enables the polarized filter(22) to enter the optical path. An image processing device(26) obtains defect information of the display substrate(12) by using an output signal of the optical detector(20). A shield case(28) receives each unit.