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发明名称
Verfahren zum gleichzeitigen Herstellen mehrerer elektrooptischer Baugruppen
摘要
申请公布号
DE19836541(B4)
申请公布日期
2004.05.27
申请号
DE19981036541
申请日期
1998.08.06
申请人
INFINEON TECHNOLOGIES AG
发明人
PLICKERT, VOLKER
分类号
H01S5/022;H01S5/0683;(IPC1-7):H01L21/58;H01L33/00;H01L31/02;H01L31/14;H01S5/06
主分类号
H01S5/022
代理机构
代理人
主权项
地址
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