发明名称 ZN-BASED SEMICONDUCTOR LIGHT EMITTING ELEMENT AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a Zn-based semiconductor light emitting element which can be easily manufactured and whose quality in light emitting region can be enhanced, and to provide its manufacturing method. <P>SOLUTION: On the main surface of a substrate 1, a pre-stage buffer layer 2', composed of an In-based compound or a Zn-based compound which are not contained in the substrate 1, is laminated as a polycrystal layer or an amorphous layer. Before a light emitting region is formed, the pre-stage buffer layer 2' is subjected to heat treatment for recrystallization, for forming a buffer layer 2. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004153062(A) 申请公布日期 2004.05.27
申请号 JP20020317354 申请日期 2002.10.31
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 ISHIZAKI JUNYA
分类号 H01L21/20;H01L21/205;H01L21/365;H01L21/477;H01L33/12;H01L33/16;H01L33/28 主分类号 H01L21/20
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