SEMICONDUCTOR ACCELERATION SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor and its manufacturing method for improving acceleration detection sensitivity without reducing accuracy in acceleration detection or stability in detection accuracy. SOLUTION: The semiconductor acceleration sensor comprises a package base part 100; a seating 110 made of glass; a silicon substrate 101; a weight body 104a; a plurality of leads 100a; and a plurality of bonding wires 103. The number 100a indicates a region in which the seating 110 is spread from the silicon substrate 101 to the outside, and an electrode pad is formed in its upper surface. Since it is possible to perform the process of connecting the electrode pad to the leads 100a by the bonding wires 103 in the seating 110 prior to the process of fixing the weight body 104a to the silicon substrate 101, it is possible to adopt a shape for the weight body 104a overhanging from the seating 110 to the outside and extended approximately a mounting surface (upper surface) of the package base part 100 . Here, it is possible to increase the mass of the weight body 104a more than that of a conventional one and improve the sensitivity of the acceleration sensor as a result. COPYRIGHT: (C)2004,JPO