| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure which enables various kinds of instrumentations by a simple optical system, in an optical characteristics measuring arrangement for measuring the optical characteristics of incident laser light, and an optical displacement gauge to which its principle is applied. SOLUTION: The optical characteristics measuring arrangement 1A has an aperture 11, where laser beam LO emitted from a semiconductor laser light-emitting element is made parallel, and enters in a parallel state; a beam splitter 12; a primary position detecting element (primary planar photodetector) 21; and a secondary position detecting element (secondary planar photodetector) 22; the beam splitter 12 comprising a prism arranged on the track of outgoing light from this aperture 11; the primary element 21 receiving the light transmitted by the transmitting-reflecting coating of the beam splitter 12; and the secondary element 22 receiving light having reached, after being reflected by the transmitting-reflecting coating of the beam splitter 12. COPYRIGHT: (C)2004,JPO
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