| 摘要 |
PROBLEM TO BE SOLVED: To make foreign matter deposited hardly, to restrain defective continuity, to make electric contact excellent, and to enhance an inspection frequency band, so as to provide a probe of high performance. SOLUTION: At least a contact part 5 is a layered body of two layers comprising a tip layer 9 and a support layer 10, the tip layer 9 is formed of a conductive material of an excellent electric characteristic, and the support layer 10 is formed of an insulation material or the like. A metal layer 11 of the potential equal to a grounding potential is provided on a surface of the support layer 10 in a side opposite to the tip layer 9. A tip portion of the contact part 5 has a small-diametric tip part 13 extended up to a position to overhang the tip layer 9 from a tip 12 of the support layer 10 and formed with a fixed thickness t. At least one side of the tip part 13 is constituted to form a curved side 14 of a round curved shape. COPYRIGHT: (C)2004,JPO
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