| 摘要 |
PROBLEM TO BE SOLVED: To provide an illuminating method capable of accurately inputting reflected light from a position recognition mark on a member even if waviness or warpage occurs on the soft member represented by FPC and TCP. SOLUTION: A diffusion plate 8 is disposed between the member 10 and an upper side camera 2, light 4 incident from a fiber illumination 3 is injected on the lower surface of the diffusion plate 8 from a diagonal lower side, and scattered light 5 from the lower surface of the diffusion plate 8 is radiated to the position recognition mark on the member 10. Then, reflected light 6 from the mark on the member is inputted into the camera 2. COPYRIGHT: (C)2004,JPO
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