发明名称 QUANTUM DOT FORMATION METHOD UTILIZING THIN-METAL FILM OR METAL POWDER
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for producing nano-sized metal oxide quantum dots with uniform size distribution, and quantum dots produced by the method; to control the size of nanoparticles by adjusting the heat treatment conditions, the percentage of the solvent, and the thickness of the insulating layer; and to control the density of the produced quantum dots by adjusting the thickness of a thin metal film, by using a multilayer thin film, by selecting the type of the solvent and adjusting the quantity of the solvent, or by making metal and precursor materials react with each other, in advance. <P>SOLUTION: This quantum dot formation method, utilizing a thin metal film, comprises a step (a) of depositing a thin-metal film layer on a substrate; a step (b) of coating the thin-metal film layer deposited on the substrate with an insulator precursor; and a step (c) of subjecting the substrate, on which the thin-metal film layer and the insulator precursor are formed, to heat treatment in a tubular furnace so that the substrate gradually reaches a maximum temperature in the range of 200°C to 500°C. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004153273(A) 申请公布日期 2004.05.27
申请号 JP20030367714 申请日期 2003.10.28
申请人 HANYANG HAK WON CO LTD 发明人 KIM YOUNG-HO;CHUNG YOON;JEON HYOUNG-JUN;PARK HWAN-PIL;YOON CHONG-SEUNG
分类号 B82B3/00;C23C14/14;C23C14/58;H01L21/302;H01L21/461;H01L29/06;(IPC1-7):H01L29/06 主分类号 B82B3/00
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