| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device which is preferable for foot print, ensures effective exchange of semiconductor wafer and LCD substrate in the processing apparatus, and also to provide extremely preferable throughput. SOLUTION: The transfer device is formed of a first transfer mechanism 5 including a setting unit configured with upper/lower-stage forks 26, 27, and a second transfer mechanism 6 including a setting unit configured with upper/lower-stage forks 31, 32 and an interval control unit which can control an interval between the upper and lower directions of the upper stage fork and lower stage fork. In the transfer device, the upper and lower stage forks 26, 27 of the first transfer mechanism 5 are held under the condition that the upper and the lower forks 31, 32 of the second transfer mechanism 6 have widened the interval. Moreover in the transfer device, the upper stage fork 31 of the second transfer mechanism 6 can move between the upper stage forks 26 of the first transfer mechanism 5, while the lower stage fork 32 can move between the lower stage forks 27 under the condition that the upper and the lower stage forks 26, 27 and forks 31, 32 are engaged with each other on the plan view. COPYRIGHT: (C)2004,JPO |
