SUBSTRATE WITH SLOT, AND FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a slotted substrate having desired characteristics. SOLUTION: In the forming method of a liquid supply slot, a hard mask 504 full for exposing a first region 510 of a first substrate surface 310 is pattern formed on the first surface 310, and a slot part 610 is formed in a substrate 306 to penetrate a smaller part than the whole of the first region 510 of the first surface 310. The forming method includes formation of the slot part 610 to have a smaller section than the section of the first region 510 at the first surface 310, and etching of the substrate 306 to form a fluid handling slot 304 by removing a material from in the first region 510 after the formation of the slot part 610. COPYRIGHT: (C)2004,JPO