| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method for a transfer part connection state for properly identifying an inferior product in an inspection stage, and to provide an electrode structure used for the inspection method. SOLUTION: A disconnection of a transfer part 18 is inspected by measuring an electrical resistance of the small area transfer part 18 comprising an opposite part of an electrode 15 for forming the small area transfer part and a counter electrode 16 for forming the small area transfer part and a sealing material 7 sandwiched with the opposite part. COPYRIGHT: (C)2004,JPO
|
