ANALYZING MAGNET FOR ION IMPLANTATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an analyzing electromagnet for an ion implantation device formed into an air-core coil with sharply reduced weight and reduced cost, heightening the uniformity of a magnetic field on a beam orbit, sharply improving the freedom of layout at production line. SOLUTION: The air-core coil of which plane view is a fan-shaped racetrack shape is composed of a plurality of coils, and the plurality of coils are arranged in a vertical direction of the beam. COPYRIGHT: (C)2004,JPO