发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device capable of preventing processing water from being conducted to flow into the photographing region of a work to be processed, even when the processing water is supplied in the work of alignment. SOLUTION: A processing device is provided on a stationary base table 2 with a chuck table 33 constituted so as to retain a work to be processed and movable to a working region as well as an alignment region neighbored to the working region, a processing means for processing while supplying the processing water to the work to be processed which is retained by the chuck table 33, a photographing means 6 for detecting a region of the work which is retained by the chuck table, and a chuck table moving means 37 for moving the chuck table 33 from the region of alignment to the working region in the feeding direction of processing. The stationary base table 2 is constituted so that the alignment region side of the same is slanted so as to become higher than the processing region side of the same table 2. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004152923(A) 申请公布日期 2004.05.27
申请号 JP20020315277 申请日期 2002.10.30
申请人 DISCO ABRASIVE SYST LTD 发明人 FUKUOKA TAKEOMI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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