Micro-electromechanical device that incorporates covering formations for actuators of the device

摘要

A micro-electromechanical device includes a substrate that incorporates drive circuitry. An elongate actuator has a fixed end that is connected to the substrate so that the actuator can receive an electrical signal from the drive circuitry and a movable end. The actuator is configured so that the movable end is displaced relative to the substrate on receipt of the electrical signal. A motion-transmitting structure is fast with the movable end of the actuator. The motion transmitting structure is connected to a working member so that movement of the actuator is translated to the working member. A covering formation is positioned on the substrate so that the substrate, the covering formation and the motion transmitting structure define an air chamber, the actuator being positioned within the air chamber.