LASER SCANNING APPARATUS AND METHODS FOR THERMAL PROCESSING

摘要

Apparatus and methods for thermally processing a substrate (60) with scanned laser radiation (14B) are disclosed. The apparatus includes a continuous radiation source (12) and an optical system (20) that forms an image (100) on a substrate (60). The image (100) is scanned relative to the substrate surface (62) so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.