| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stress sensor for increasing the output of the sensor without accompanying difficulty in manufacture and without reducing strength in the entire stress sensor. <P>SOLUTION: In the stress sensor, where given stress stimulates a strain gauge 1 arranged on the surface of a flake-like region 5 on a substrate 2 and the direction and size of the stress can be grasped by a change in the characteristic value of the strain gauge 1, the width of the flake-like region 5 on the substrate 2, where the strain gauge 1 is arranged, is set narrower than that of another flake-like region 5. Or, in the stress sensor, where the substrate 2 has a center region 4 and at least one flake-like region 5 joined to the center region 4, the given stress stimulates the strain gauge 1 arranged in the joined region, the direction and size of the stress can be grasped by the change in the characteristic value of the strain gauge 1, the width of the flake-like region 5 composing the joined region, where the strain gauge 1 is arranged, is set narrower than that of another flake-like region 5. <P>COPYRIGHT: (C)2004,JPO</p> |
