发明名称 METHOD AND APPARATUS FOR MANUFACTURING THIN PLATE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a thin plate having a good shape without unevenness of thickness and a strainless good crystal structure by uniforming the temperature distribution of the main surface of a substrate where the thin plate is formed. <P>SOLUTION: The thin plate is manufactured by dipping the substrate 1 having the surface for the thin plate growth in a melt 17 and growing the thin plate on the surface for the thin plate growth by solidification, where the substrate dipping process to dip at least a part of the surface for the thin plate growth in the melt 17 and the substrate taking-out process to take out the surface for the thin plate growth from the melt 17 are contained. These processes for dipping the substrate and taking it out are done by rotating the substrate 1. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004149375(A) 申请公布日期 2004.05.27
申请号 JP20020318272 申请日期 2002.10.31
申请人 SHARP CORP 发明人 NISHITANI YASUNOBU
分类号 C01B33/02;C30B28/04;H01L31/04;(IPC1-7):C30B28/04 主分类号 C01B33/02
代理机构 代理人
主权项
地址