| 摘要 |
A ferroelectric thin film comprising at least two stock solutions is made so that the stock solutions are mixed homogeneously in the plane and over the thickness on a substrate, or so that the stock solutions are mixed having a distribution in the plane and over the thickness on the substrate. A ferroelectric thin film mixed homogeneously in the plane is made by discharging two stock solutions 105 and 106 separately at a fixed discharging rate by separate inkjet heads using an inkjet apparatus having at least two inkjet heads, and a ferroelectric thin film mixed homogeneously over the thickness is made by repeating this process. Moreover, a ferroelectric thin film having a distribution of the stock solutions is made by changing the discharging rate in the thickness direction or the in-plane direction.
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