SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor capable of reducing heat hysteresis without impairing an offset temperature characteristic.

SOLUTION: In this semiconductor acceleration sensor equipped with a frame 1 comprising a semiconductor substrate, a deadweight part 2 arranged in the frame 1, and a beam 3 for connecting the deadweight part 2 to the frame 1 in the suspended state, a plurality of output-enabling electrodes capable of outputting a signal from inside the sensor to the outside of the sensor are provided on the frame 1 symmetrically with respect to a first face which is a vertical face to the frame 1 parallel with the beam 3 and passing the center of gravity of the deadweight part 2.

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