发明名称 |
Spatial light modulators with light blocking/absorbing areas |
摘要 |
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
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申请公布号 |
US2004100677(A1) |
申请公布日期 |
2004.05.27 |
申请号 |
US20020305536 |
申请日期 |
2002.11.26 |
申请人 |
REFLECTIVITY, INC., A CALIFORNIA CORPORATION |
发明人 |
HUIBERS ANDREW G.;PATEL SATYADEV R. |
分类号 |
B81B3/00;B81B7/00;B81C1/00;B81C99/00;G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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