发明名称 COMPARING OPTICAL SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a comparing optical system which is user-friendly constituted and which sends out reproducible result. SOLUTION: The comparing optical system 1 is constituted of a first macroscope 2a and a second macroscope 2b which are connected with each other via a bridge 3. A first XYZ table 8a is assigned to the first macroscope 2a and a second XYZ table 8b is assigned to the second macroscope 2b. A control/regulating device 14 is provided between the first XYZ table 8a and the second XYZ table 8b. Further the system 1 can move the electrically movable XYZ tables 8a, 8b in all of three spacial directions by synchronizing the tables and can also adjust and change various kinds of functions. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004151732(A) 申请公布日期 2004.05.27
申请号 JP20030371460 申请日期 2003.10.31
申请人 LEICA MICROSYSTEMS WETZLAR GMBH 发明人 GILBERT MANFRED
分类号 G01N1/00;G01N21/956;G02B21/18;G02B21/24;G02B21/26;(IPC1-7):G02B21/18 主分类号 G01N1/00
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