LEAKAGE INSPECTION APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive leakage inspection apparatus and method for improving accuracy in leakage inspection and shortening the time required for the inspection. SOLUTION: In the leakage inspection apparatus A, a work 12 is inserted in a hood 11. Gaseous nitrogen is supplied to the inside of the hood 11, and gaseous helium is supplied to the inside of the work 12. The work 12 is inspected for leakage from the gaseous helium in an inspection gas extracted out of the hood 11. The leakage inspection apparatus A is provided with both a gaseous helium separator 41 for separating the gaseous helium in the inspection gas and a trace gas detector 55 for detecting the gaseous helium. A buffer tank 53 for storing the inspection gas in a pressurized state is provided so as to supply the inspection gas for the gaseous helium separator 41 when the inside of the buffer tank 53 reaches a prescribed pressure. The pressure of the upstream side of the gaseous helium separator 41 is higher than that of its downstream side. COPYRIGHT: (C)2004,JPO