| 摘要 |
PROBLEM TO BE SOLVED: To provide a running type vacuum deposition type system in which a main roll 3 obtained by providing the outer circumferential face of a metallic cylindrical body with a stacked coating consisting of an insulating film, an electroconductive film and a surface insulating film, and arranged inside a vacuum tank body 1 is provided, and, while running is performed in a state where a running film 7 is wound, a thin film is deposited on the running film, and wherein the occurrence of abnormal discharge inside the vacuum tank body 1 is prevented while utilizing the electrostatic adsorption effect between the main roll 3 and the running film 7. SOLUTION: A sliding brush part 16b on a fixing side connected to a power source 17 for applying voltage and a sliding brush part 16a on a rotation side slid and contacted with the brush 16b are placed at a main roll shaft 20 extendedly provided on the outside (on the air side) of the vacuum tank body 1. An electric wiring cable 14a connected to the electroconductive film and the sliding brush part 16a are connected via an electricity introduction port 15b so that they are located inside the shaft 20 and are also not interfered with a cooling medium passage inside the shaft 20. COPYRIGHT: (C)2004,JPO
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