| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas feed nozzle superior in gas sealability. SOLUTION: The gas feed nozzle comprises an outer tube having both ends blocked; an inner tube having a filler layer with air permeability formed in the inner part, one end side inserted in the outer tube, and the other end side protruding to the outside of a furnace through the end of the outer tube; a short pipe with a male screw part on one end, which is inserted to the inside of the other end of the outer tube which protrudes to the outside of the furnace, and is fixed on the outside of the furnace body through the other end side; and a cap-shaped member having a female screw part which is screwed by the male screw of the above short pipe. The gas feed nozzle also has a seal press member having a fit insertion hole penetrating the center of the main body along with a circular seal press part inside the above female screw part; a gas feed pipe inserted into the inner part of the above other end part of the inner tube through the fit insertion hole of the above seal press member; and an annular packing for forming a seal part between the above inner tube and the short pipe by a compression due to the seal press part, which is installed between the end face of the inner tube and the head of the seal press part of the above seal press member, in the inner tube and the short pipe. COPYRIGHT: (C)2004,JPO
|
