发明名称 |
Systems and methods for overcoming stiction |
摘要 |
A number of methods and systems for overcoming stiction are provided. The systems include electromechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
|
申请公布号 |
US2004101234(A1) |
申请公布日期 |
2004.05.27 |
申请号 |
US20030719857 |
申请日期 |
2003.11.20 |
申请人 |
PTS CORPORATION |
发明人 |
MILLER DAVID;MULLER LILAC;ANDERSON ROBERT L. |
分类号 |
B81B3/00;G02B6/35;G02B26/08;H02N1/00;H02N2/00;(IPC1-7):G02B6/26 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|