SILICON CARBIDE SINTERED PRODUCT AND METHOD FOR PRODUCTION THEREOF

摘要

A silicon carbide sintered product, which has a porosity of 15 % to 30 % wherein the porosity is determined by measuring the area of silicon carbide particles and the area of silicon particles observed on a polished surface of a cross section thereof, and calculating the porosity according to the formula: porosity (%) = (the area of silicon particles/( the area of silicon particles + the area of silicon carbide particles)) X 100, and has a content of residual silicon is 4 % or less relative to the total volume thereof