| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage that can maintain airtightness between the inside and the outside of a stem at temperature rising time with a simple structure and can make the temperature distribution in a plate uniform. SOLUTION: This stage 1 is provided with the plate 2, the stem 3, and a seal ring 4. This stage 1 is also provided with first and second sealing member 5 and 6. The seal ring 4 is inserted between a first sealing surface 15 formed on the plate 2 and a second sealing surface 17 formed on the stem 3. The first sealing member 5 is attached between the seal ring 4 and the first sealing surface 15, and the second sealing member 6 is attached between the ring 4 and the second sealing surface 17. The plate 2 and the stem 3 are fixed with screws (clamping members) 27. The coefficient of linear expansion of the ring 4 is larger than those of the plate 2 and the stem 3. When the plate 2 is heated, the ring 4 expands and presses the first and the second sealing members 5 and 6 against the first and the second sealing surfaces 15 and 17. COPYRIGHT: (C)2004,JPO
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