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发明名称
VERFAHREN UND VORRICHTUNG ZUM ABSCHEIDEN INSBESONDERE ORGANISCHER SCHICHTEN IM WEGE DER OVPD
摘要
申请公布号
DE50102071(D1)
申请公布日期
2004.05.27
申请号
DE20015002071
申请日期
2001.09.22
申请人
AIXTRON AG
发明人
JUERGENSEN, HOLGER;STRAUCH, GERD;SCHWAMBERA, MARKUS
分类号
C23C16/448;C23C16/455;(IPC1-7):C23C16/448
主分类号
C23C16/448
代理机构
代理人
主权项
地址
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