| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To compactify bearing mechanisms for rotation-supporting a rotary stage of a rotary table provided in a fluorescence X-ray spectrometer to reduce a size of the fluorescence X-ray spectrometer. <P>SOLUTION: In this fluorescence X-ray spectrometer, the plurality of bearing mechanisms is provided with a prescribed interval in an outer circumference of the rotary stage, and each of the bearing mechanisms is compactified to compactify constitution for a bearing for rotation-supporting the rotary stage. A rotational torque of the rotary bearing itself is also reduced by using the small-sized rotary bearing for constituting the each bearing mechanism, so as to drive the rotary stage with the reduced torque. The turn table 1 of the fluorescence X-ray spectrometer is provided with the turning stage 2 having in its inside an opening part 2c for transmitting at least an irradiated X-ray and an X-ray emitted from a sample, and the plurality of bearing mechanisms 30 (31, 32, 33) arranged with the intervals along an outer circumferential part 2a of the turning stage 2. <P>COPYRIGHT: (C)2004,JPO</p> |
