| 摘要 |
PROBLEM TO BE SOLVED: To obtain a display device constituted of an insulating substrate having active elements on a stable and high quality semiconductor film (silicon film) formed only on a required position. SOLUTION: Areas 104, 105, 106, 107, 108, 109, and 110 are formed in a driving circuit forming area 102 provided on the outside of a display area 101 on an insulating substrate 1. These areas are annealed by scanning them with continuous oscillation laser light converged linearly or rectangularly (like a band) while turning on/off the laser light to reform the areas into a band-shaped polycrystalline silicon film containing a crystal having no grain boundaries which are crossing the direction of a current flowing in an active layer. COPYRIGHT: (C)2004,JPO |
