| 摘要 |
PROBLEM TO BE SOLVED: To prevent variations in property and quality that is caused by the timing variations for generating a glow discharge in a plurality of vacuum processing containers connected to the same exhaust system and the same raw gas feeding apparatus. SOLUTION: First, an inert gas is introduced into processing containers 101, 102, 103 (step S1). Next, by operating throttle valves 411, 412, 413, pressures in the processing containers 101, 102, 103 are each adjusted to a predetermined preset pressure (step S2). After each of the pressures has become the preset pressure, high frequency electric power is applied by high frequency electrical sources 711, 712, 713 (step S3). In the next place, sensors 601, 602, 603 detect the generation of the glow discharge in each of the containers 101, 102, 103 (step S4a, S4b, S4c). After the discharge has become stabilized, the raw gas is supplied simultaneously to start the vacuum processing. COPYRIGHT: (C)2004,JPO
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