| 发明名称 |
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD |
| 摘要 |
<p>A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.</p> |
| 申请公布号 |
SG103893(A1) |
申请公布日期 |
2004.05.26 |
| 申请号 |
SG20020007176 |
申请日期 |
2002.11.27 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
JACOBS, HERNES;VOSTERS, PIET;HOL, SVEN ANTOIN JOHAN;VAN DER SCHOOT, HARMEN KLAAS;VAN DIESEN, ROBERT JOHANNES PETRUS;CALLEN, DAVID WILLIAM |
| 分类号 |
G03F7/20;H01L21/027;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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