首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
METHOD OF PROCESSING WAFER
摘要
申请公布号
EP1187188(A4)
申请公布日期
2004.05.26
申请号
EP20010902832
申请日期
2001.02.09
申请人
TOKYO ELECTRON LIMITED
发明人
SUZUKI, FUJIO;SAKAMOTO, KOICHI;WANG, WENLING;YASUHARA, MOYURU
分类号
C23C16/46;H01L21/00;(IPC1-7):C23C16/46;H01L21/205
主分类号
C23C16/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
LIGHT EMITTING MOLECULES AND ORGANIC LIGHT EMITTING DEVICES INCLUDING LIGHT EMITTING MOLECULES
TRANSMUCOSAL ADMINISTRATION OF AGGREGATED ANTIGENS
Trimming of a two point phase modulator
NEEDLE-FREE VALVE AND CATHETER ASSEMBLY
SECURITY STATUS INDICATION FOR CONSUMER EQUIPMENT
SITUATION CONTROL AND MONITORING SYSTEM FOR HIGHLY HAZARDOUS SITES
BITUMEN COMPOSITION
CLOFARABINE AND TAXANE CHEMOTHERAPY COMBINATION
CRUDE OEL SEPARATOR DEVICE USING ULTRASONIC WAVES
HYDROGENATED NITRILE RUBBER COMPOSITES WITH IMPROVED PROCESSABILITY
COMPOSITIONS AND METHODS FOR TREATING PAIN
A COMPOSITION COMPRISING SELEGELINE, PROCAINE, VINPOCETINE, TRIMETHYLGLYCINEAN AND A N-GABA INGREDIENT FOR TREATING NEURODEGENERATIVE DISORDERS
Vibratory separator
BULK DIFFUSER FOR FLAT PANEL DISPLAY
COMPOSITIONS FOR USE IN ENERGY CURABLE COMPOSITIONS
Envelope elimination and restoration amplifier and method thereof
VECTOR REPRESENTATION OF POLARIZATION DEPENDENT LOSS
AN ICE MAKER HAVING FAN ASSEMBLY AND FAN ASSEMBLY CONTROL METHOD
Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles
THREE DIMENSIONAL IMAGE PROCESSING
