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发明名称
Methods and apparatus for forming a film on a substrate
摘要
申请公布号
GB0408705(D0)
申请公布日期
2004.05.26
申请号
GB20040008705
申请日期
2001.01.17
申请人
TRIKON HOLDINGS LIMITED
发明人
分类号
C23C16/30;C23C16/36;C23C16/505;H01L21/311;H01L21/314;H01L21/316;H01L21/318;H01L21/768
主分类号
C23C16/30
代理机构
代理人
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地址
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