发明名称 |
Quadrature phase shift interferometer with unwrapping of phase |
摘要 |
A method and apparatus for interferometnc measurement of a medium surface is disclosed. More particularly, a quadrature phase shift interferometer and a process for unwrapping phase are described. The interferometer has a reduced number of optical components though yields results sufficient to measure surface of a hard disc for final inspection. Defects on such a surface are characterized by their out-of-plane displacement with nanometer resolution.
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申请公布号 |
US6741357(B2) |
申请公布日期 |
2004.05.25 |
申请号 |
US20010000001 |
申请日期 |
2001.10.24 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
WANG JIANMIN;PRESSESKY JASON L. |
分类号 |
G01B9/02;G01B11/30;(IPC1-7):G01B9/07 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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