Angular velocity sensor

摘要

An angular velocity sensor includes a substrate; a first vibrator supported on the substrate by a first support beam, such as to be vibratable in a direction parallel to the substrate; a second vibrator supported by a second support beam parallel to the first vibrator, such as to be vibratable in a direction orthogonal to the vibrating direction of the first vibrator; a vibration generator for vibrating the first vibrator parallel to the substrate; an angular velocity detector for detecting the amount of displacement of the second vibrator due to an angular velocity; and a vibration-state monitor provided between the substrate and the first vibrator for monitoring the amount of displacement of the first vibrator when it is vibrated by the vibration detector.