发明名称 VORRICHTUNG UND VERFAHREN ZUM MODIFIZIEREN EINER WERKSTÜCK-OBERFLÄCHE MIT HILFE VON PHOTONEN-STRAHLUNG
摘要 <p>The invention relates to a device and a method for modifying the surface (1') of a workpiece using photonic radiation (2), especially laser radiation. Said device comprises a radiation source (3) and a mask device, said mask device being configured by a support (7), permeable to the radiation (2), to whose side facing the workpiece (1) individual lens elements (9) are adhered and the radiation (2) is bundled into partial beams (10) by the individual lens elements (9).</p>
申请公布号 AT411755(B) 申请公布日期 2004.05.25
申请号 AT20010002019 申请日期 2001.12.21
申请人 BAEUERLE DIETER DR.;INNOVATIONSAGENTUR GESELLSCHAFT M.B.H. 发明人
分类号 B23K26/06;B23K26/066;B23K26/067;G03F7/20;(IPC1-7):B81C1/00;H01L21/027 主分类号 B23K26/06
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