发明名称 Refrigeration cooling assisted MEMS-based micro-channel cooling system
摘要 A refrigeration cooling assisted MEMS-based micro-channel cooling system that removes high heat densities generated by microelectronic components using a primary cooling system thermally coupled with a secondary chip embedded cooling system.
申请公布号 US6741469(B1) 申请公布日期 2004.05.25
申请号 US20030360345 申请日期 2003.02.07
申请人 SUN MICROSYSTEMS, INC. 发明人 MONFARAD ALI HEYDARI
分类号 H01L23/427;(IPC1-7):H05K7/20 主分类号 H01L23/427
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