发明名称 |
Refrigeration cooling assisted MEMS-based micro-channel cooling system |
摘要 |
A refrigeration cooling assisted MEMS-based micro-channel cooling system that removes high heat densities generated by microelectronic components using a primary cooling system thermally coupled with a secondary chip embedded cooling system.
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申请公布号 |
US6741469(B1) |
申请公布日期 |
2004.05.25 |
申请号 |
US20030360345 |
申请日期 |
2003.02.07 |
申请人 |
SUN MICROSYSTEMS, INC. |
发明人 |
MONFARAD ALI HEYDARI |
分类号 |
H01L23/427;(IPC1-7):H05K7/20 |
主分类号 |
H01L23/427 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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